Boosting Semiconductor Throughput: Agile Motion Control for High-Speed Manufacturing
As semiconductor technology rapidly advances – focusing on miniaturization and higher integration – equipment manufacturers face intense pressure. They need to develop new machines faster, increase production throughput, maintain stringent quality, and manage costs in a competitive market. Agile motion control for high-speed manufacturing, dependable stepper motors are a necessity.
These demands directly impact the technologies and components equipment builders choose for their machines.
The Challenge: A Throughput Bottleneck in Front-End Equipment
Consider a common scenario: a manufacturer specializing in front-end semiconductor processing equipment struggled to increase the throughput of their machines. Their wafer transport sections, critical for speed and precise positioning, relied on traditional servo systems.
To achieve higher speeds, their initial thought involved larger servo motors and complex software development. However, this approach had significant drawbacks:
- Slow Development Cycles: Designing, tuning (like complex gain adjustments), and validating larger servo systems are time-consuming engineering tasks.
- Reduced Fab Productivity: Bigger motors and drive components consume valuable space. In a semiconductor fab, floor space is expensive. Equipment density matters, and larger components reduce the potential number of processing units per square foot, impacting overall productivity.
- Increased Costs: Upgrading to more powerful servo components directly adds to the equipment’s bill of materials.
This manufacturer needed a motion control solution that could deliver faster, more precise transport without the typical penalties of increased development time, larger footprint, or higher cost.
Finding the Right Agile Motion Control for High-Speed Manufacturing Solution
Seeking alternatives, the company’s chief designer explored different technologies. Their search led them to SANYO DENKI’S SANMOTION Model No. PB, a closed-loop stepping system. This technology merges the benefits of both servo and stepper motors.
What made the closed-loop stepper particularly appealing for semiconductor transport was its characteristics ideal for short-stroke movements:
- High Torque at Low Speeds: Stepper motors inherently offer high torque at low RPMs, perfect for rapid acceleration and deceleration over short distances.
- No “Step-Out”: Unlike traditional open-loop steppers, the closed-loop system uses positional feedback, eliminating the risk of losing steps and ensuring reliable, accurate positioning similar to a servo.
Evaluation: Simplicity Meets Powerful Performance
The manufacturer evaluated the SANMOTION PB system. They were immediately impressed by its ease of use. Compared to the complex parameter settings and gain tuning required by many servos, the closed-loop stepper could be controlled easily using simple I/O commands linked to pre-set points – significantly accelerating the evaluation and integration process.
Testing confirmed the performance benefits:
- Downsizing Capability: The high low-speed torque allowed them to achieve the same or better operating characteristics with a smaller motor size than their previous servo.
- Faster Positioning: Short-distance positioning time was significantly reduced, directly boosting machine throughput.
- Dramatic Space Savings: A 4-axis integrated amplifier design resulted in a remarkable 75% reduction in drive unit space. This also simplified wiring and reduced weight.
- Stable Positioning: The system’s control switches to open-loop when stopped, effectively eliminating micro-vibrations often seen with servos, ensuring stable, precise final positioning.
The Result: Industry-Leading Throughput and Significant Cost Reduction
Convinced by the evaluation, the manufacturer integrated the SANMOTION PB into their new semiconductor manufacturing equipment. The impact on performance was substantial.
The chief designer reported achieving the industry’s highest level of throughput with the new equipment. The physical size of the transfer section was reduced by roughly half. This smaller footprint meant their customers could install more processing units in the same fab space, dramatically increasing overall productivity per unit area. Furthermore, by switching from their previous servo system to the SANMOTION PB, the cost of the entire drive system was reduced by approximately 75%.
Conclusion
This case study demonstrates how agile motion control for high-speed manufacturing is crucial for success in demanding applications like semiconductor manufacturing. By adopting SANYO DENKI’S agile and reliable closed-loop stepper technology, the equipment manufacturer not only overcame significant throughput and development challenges but also achieved substantial cost reduction and improved productivity – key factors for competitiveness in the fast-paced automation and electrical industry.
For B2B suppliers and equipment builders alike, focusing on innovative components that simplify integration, enhance performance, and reduce total cost of ownership is essential for meeting the evolving demands of the market.