Efficiency and accuracy are essential in semiconductor manufacturing processes such as wafer handling, lithography, and inspection, where sub-micron errors can compromise yield and throughput. The SANMOTION G series by SANYO DENKI is built to deliver the nanopositioning precision and system integration flexibility that these applications demand.

• Nanometer-Level Precision Support
  Equipped with high-resolution encoder options up to 27 bits (134,217,728 pulses/revolution), the SANMOTION G series enables nanometer-scale motion control. This level of positional feedback is critical in wafer inspection, photomask alignment, and advanced lithography, where even the smallest deviation can affect critical layer overlay or defect detection.

• 35% Reduction in Wiring
  The system design consolidates connections for power, functional safety, and regenerative resistors, reducing wiring by up to 35%. This not only simplifies installation and design but also improves airflow and system reliability—a key advantage in cleanroom environments where cable management is critical.

• Synchronized 2-Axis Operation Without Dedicated Cables
  Achieve coordinated 2-axis movement without additional communication cables between amplifiers. This function simplifies complex multi-axis configurations often required in precision motion systems, enabling tighter mechanical synchronization in less time.

• Built-in 2-Axis Program Operation
  With onboard 2-axis programmable motion, users can execute synchronized sequences with simple, high-level commands. The amplifier provides simultaneous monitoring of both axes, making it easier to implement and validate complex motion profiles without relying on external motion controllers.

• Simplified Setup and Real-Time Monitoring
  The updated MOTOR SETUP SOFTWARE streamlines commissioning by allowing engineers to configure and monitor both axes using a single cable. A new interface displays both axes’ real-time motion on one screen, accelerating setup, tuning, and diagnostics—reducing equipment startup time and supporting long-term maintainability.